-
1 light pattern
n оптичне зображення; світлове зображення -
2 exposure
1) експонування 2) розкриття, оголення (напр. шару під маскою) - contact exposure
- deep-UV exposure
- die-by-die pattern exposure
- direct wafer exposure
- direct-writing exposure
- electron-beam exposure
- flood exposure
- full-field [full-wafer] exposure
- ion exposure
- laser exposure
- light optical exposure
- light exposure
- mask exposure
- multiple exposure
- pattern exposure
- postdevclopment exposure
- projection exposure
- proton exposure
- proximity exposure
- SOR exposure
- step-and-repeat exposure
- synchrotron exposure
- ultraviolet exposure
- X-ray exposure -
3 element
1) елемент; компонент; прилад; інтегральна схема, ІС (див. т-ж chip, circuit, component) 2) (хімічний) елемент - array element
- capacitive-storage element
- chevron propagating element
- chip element
- circuit element
- column III & V element
- combinational logic element
- control element
- cryogenic element
- distributed element
- doping element
- electronic element
- field-effect-transistor element
- floating-gate element
- functional element
- fuse element
- generic element
- Gunn element
- Hall element
- image element
- impurity element
- inclusive OR element
- integrated element
- inverting element
- Josephson junction element
- key element
- library element
- light-emitting semiconductor element
- light-receiving element
- linear element
- logical element
- lumped-circuit element
- magnetic propagation element
- majority element
- march element
- matrix element
- memory element
- microcircuit element
- microelectronic element
- monolithic element
- multiple logic element
- NAND element
- NAND-NOR element
- negative-resistance element
- network element
- nonlinear element
- one-transistor element
- optoelectronic element
- parasitic element
- passive element
- pattern element
- phantom element
- picture element
- propagating element
- propagation element
- redundant element
- resolution element
- semiconductor element
- shared element
- solid-state element
- stripe-geometry element
- superconducting element
- thick-film element
- thin-film element
- ultratrace element -
4 etching
травлення (див. т-ж etch) - anisotropic etching
- anode etching
- batch etching
- blanket etching
- chemically assisted etching
- concentration dependent etching
- crystallographically sensitive etching
- deep reactive ion etching DRIE
- deep reactive ion etching
- differential etching
- digital etching
- diode ion etching
- diode etching
- dip etching
- directional etching
- dislocation etching
- dry process etching
- dry etching
- electron-beam induced etching
- excessive etching
- exciraer laser etching
- gas-phase plasma-assisted etching
- high-frequency ion etching
- hydrogen reactive ion etching
- ion etching
- ion-assisted plasma etching
- ion-beam induced etching
- isotropic etching
- jet etching
- laser-enhanced etching
- laser-induced pattern projection etching
- laser radical etching
- lateral etching
- lift-off etching
- light-induced etching
- low-pressure plasma etching
- low-pressure etching
- masked etching
- maskless etching
- maskless laser etching
- mesa etching
- microwave plasma etching
- microwave etching
- mild etching
- nonundercutting etching
- orientation-dependent etching
- oxygen gas plasma etching
- permeation etching
- photochemical etching
- photoelectrochemical etching
- photo-enhanced chemical dry etching
- photoexcited etching
- photo-initiated etching
- photoresist-masked etching
- plasma reactor etching
- plasma etching
- post etching
- preferential etching
- radical plasma etching
- radical etching
- radio-frequency plasma etching
- reactive ion etching
- regenerative etching
- resistless etching
- selective etching
- sharp etching
- sideways etching
- single-step laser etching
- spray etching
- sputter etching
- steady-state etching
- synchrotron radiation-assisted etching
- taper etching
- tetrode ion etching
- tetrode etching
- triode ion etching
- triode etching
- undercuttingetching
- undercutetching
- UV laser etching
- vacuum ultraviolet-assisted etching
- vertical etching
- VUV-assisted etching
- wet chemical etching
- wet etching
- zero-undercut etching -
5 matrix
матриця (див. т-ж array) - admittance matrix
- damping matrix
- identity matrix
- interconnection matrix
- layered matrix
- light-emitting diode matrix
- memory matrix
- metastable matrix
- multipattern matrix
- pattern matrix
- reachability matrix
- sparse matrix
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