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ion-beam sputter etching

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  • Ion-beam sculpting — Ion Beam scultping is a term used to describe a two step process to make solid state nanopores. The term itself was coined by Golovchenko and co workers at Harvard in the paper Ion beam sculpting at nanometer length scales [J. Li, D. Stein, C.… …   Wikipedia

  • Deep reactive-ion etching — (DRIE) is a highly anisotropic etch process used to create deep penetration, steep sided holes and trenches in wafers, with aspect ratios of 20:1 or more. It was developed for microelectromechanical systems (MEMS), which require these features,… …   Wikipedia

  • Photonic metamaterial — Electromagnetism Electricity · …   Wikipedia

  • Transmission electron microscopy — A TEM image of the polio virus. The polio virus is 30 nm in size.[1] Transmission electron microscopy (TEM) is a microscopy technique whereby a beam of electrons is transmitted through an ultra thin specimen, interacting with the specimen as it… …   Wikipedia

  • RIE — Plasma unterstütztes Ätzen ( physikalisch chemisches Ätzen) bezeichnet eine Gruppe von subtraktiven (abtragenden) Mikrostrukturverfahren in der Halbleitertechnologie. Als Trockenätzverfahren stellen eine alternative Strukturierungverfahren zu dem …   Deutsch Wikipedia

  • Reaktives Ionenätzen — Plasma unterstütztes Ätzen ( physikalisch chemisches Ätzen) bezeichnet eine Gruppe von subtraktiven (abtragenden) Mikrostrukturverfahren in der Halbleitertechnologie. Als Trockenätzverfahren stellen eine alternative Strukturierungverfahren zu dem …   Deutsch Wikipedia

  • Surface finishing — is a broad range of industrial processes that alter the surface of a manufactured item to achieve a certain property.[1] Finishing processes may be employed to: improve appearance, adhesion or wettability, solderability, corrosion resistance,… …   Wikipedia

  • Sample Preparation Equipment — refers to equipment used for the preparation of physical specimens for subsequent microscopy or related disciplines including failure analysis and quality control. The equipment includes the following types of machinery:* Precision cross… …   Wikipedia

  • Sputtering — is a process whereby atoms are ejected from a solid target material due to bombardment of the target by energetic ions. It is commonly used for thin film deposition, etching and analytical techniques (see below). Physics of sputtering Physical… …   Wikipedia

  • spectroscopy — spectroscopist /spek tros keuh pist/, n. /spek tros keuh pee, spek treuh skoh pee/, n. the science that deals with the use of the spectroscope and with spectrum analysis. [1865 70; SPECTRO + SCOPY] * * * Branch of analysis devoted to identifying… …   Universalium


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