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1 photo-enhanced chemical dry etching
фотостимульоване хімічне сухе травленняEnglish-Ukrainian dictionary of microelectronics > photo-enhanced chemical dry etching
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2 etching
травлення (див. т-ж etch) - anisotropic etching
- anode etching
- batch etching
- blanket etching
- chemically assisted etching
- concentration dependent etching
- crystallographically sensitive etching
- deep reactive ion etching DRIE
- deep reactive ion etching
- differential etching
- digital etching
- diode ion etching
- diode etching
- dip etching
- directional etching
- dislocation etching
- dry process etching
- dry etching
- electron-beam induced etching
- excessive etching
- exciraer laser etching
- gas-phase plasma-assisted etching
- high-frequency ion etching
- hydrogen reactive ion etching
- ion etching
- ion-assisted plasma etching
- ion-beam induced etching
- isotropic etching
- jet etching
- laser-enhanced etching
- laser-induced pattern projection etching
- laser radical etching
- lateral etching
- lift-off etching
- light-induced etching
- low-pressure plasma etching
- low-pressure etching
- masked etching
- maskless etching
- maskless laser etching
- mesa etching
- microwave plasma etching
- microwave etching
- mild etching
- nonundercutting etching
- orientation-dependent etching
- oxygen gas plasma etching
- permeation etching
- photochemical etching
- photoelectrochemical etching
- photo-enhanced chemical dry etching
- photoexcited etching
- photo-initiated etching
- photoresist-masked etching
- plasma reactor etching
- plasma etching
- post etching
- preferential etching
- radical plasma etching
- radical etching
- radio-frequency plasma etching
- reactive ion etching
- regenerative etching
- resistless etching
- selective etching
- sharp etching
- sideways etching
- single-step laser etching
- spray etching
- sputter etching
- steady-state etching
- synchrotron radiation-assisted etching
- taper etching
- tetrode ion etching
- tetrode etching
- triode ion etching
- triode etching
- undercuttingetching
- undercutetching
- UV laser etching
- vacuum ultraviolet-assisted etching
- vertical etching
- VUV-assisted etching
- wet chemical etching
- wet etching
- zero-undercut etching -
3 dry chemical etching technolog/y
технологія сухого травленняEnglish-Ukrainian dictionary of microelectronics > dry chemical etching technolog/y
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4 dry (process) etching
сухе травлення. Процес травлення в газовій фазі, за допомогою фізичної і/або хімічної реакції реактивного газу або плазмиEnglish-Ukrainian dictionary of microelectronics > dry (process) etching
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5 dry (process) etching
сухе травлення. Процес травлення в газовій фазі, за допомогою фізичної і/або хімічної реакції реактивного газу або плазмиEnglish-Ukrainian dictionary of microelectronics > dry (process) etching
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6 technolog/y
1) технологія (див. т-ж арproach, technique) 2) техніки - advanced technolog/y
- alignment technolog/y
- analog technolog/y
- baseline technolog/y
- basic technolog/y
- batch technolog/y
- beam-tape technolog/y
- bi-FET technolog/y
- bi-MOS technolog/y
- BIMOS technolog/y
- bipolar technolog/y
- bit-slice technolog/y
- beardless technolog/y
- BSA technolog/y
- bubble technolog/y
- bumping technolog/y
- CAD technolog/yies
- CCD technolog/y
- cell array technolog/y
- cermet technolog/y
- CMOS technolog/y
- coating technolog/y
- cryogenic technolog/y
- current technolog/y
- custom-design technolog/y
- deep-ultraviolet photolithographic technolog/y
- dense LSI technolog/y
- diffused epitaxial planar technolog/y
- diffusion technolog/y
- digital technolog/y
- dominant technolog/y
- dry technolog/y
- dry chemical etching technolog/y
- ECL technolog/y
- electron technolog/y
- electron-beam exposure technolog/y
- electron-parts technolog/y
- electro-optical technolog/y
- epibase technolog/y
- epiplanar technolog/y
- epitaxial planar technolog/y
- film-carrier technolog/y
- fine-line technolog/y
- flip-chip bonding technolog/y
- flip-chip technolog/y
- full-slice technolog/y
- fuse-link technolog/y
- fusible-link technolog/y
- gallium arsenide technolog/y
- gate-array technolog/y
- high technolog/y
- high-density technolog/y
- high-electron mobility transistor technolog/y
- “high-end” technolog/y
- high-speed technolog/y
- hybrid technolog/y
- industry-standard MOS technolog/y
- information technolog/y
- inner-lead bonding technolog/y
- integration technolog/y
- interconnection technolog/y
- isoplanar technolog/y
- J-FET technolog/y
- Josephson-junctiontechnolog/y
- Josephsontechnolog/y
- leading-edge technolog/y
- lithographic technolog/y
- logic technolog/y
- low technolog/y
- “low-end” technolog/y
- low-power technolog/y
- magnetic-bubble technolog/y
- mainstream technolog/y
- mask-fabrication technolog/y
- master-slice technolog/y
- merged bipolar technolog/y
- merged technolog/y
- metal-board technolog/y
- metallization technolog/y
- microcircuit technolog/y
- microelectronic technolog/y
- microsystems technolog/y MST
- microsystems technolog/y
- MIS technolog/y
- mixed technolog/y
- monolithic technolog/y
- MOS technolog/y
- MTL technolog/y
- multilayer-wiring technolog/y
- multiple-epitaxial planar technolog/y
- n-channel technolog/y
- optical lithographic technolog/y
- oxide-isolated monolithic technolog/y
- passivation technolog/y
- p-channel technolog/y
- p-channel Si-gate technolog/y
- photofabrication technolog/y
- planar fabrication technolog/y
- planar technolog/y
- plasma technolog/y
- plating technolog/y
- polysilicon-gate technolog/y
- polysilicon-load technolog/y
- polysilicon self-aligned PSA technolog/y
- polysilicon self-aligned technolog/y
- resistless etching technolog/y
- robotic technolog/y
- scaled process technolog/y
- scaled technolog/y
- Schottky transistor logic technolog/y
- Schottky TTL technolog/y
- screen-and-fire technolog/y
- self-aligned source-drain diffusion technolog/y
- shared silicon technolog/y
- silicide-gate technolog/y
- silicon technolog/y
- silicon-gate technolog/y
- silicon-in-insulator technolog/y
- silicon-in-sapphire technolog/y
- silicon-on-insulator technolog/y
- silicon-on-sapphire technolog/y
- silicon wafer technolog/y
- single-diffused planar technolog/y
- single-diffused technolog/y
- solid-state technolog/y
- spider-bonding technolog/y
- standard bipolar technolog/y
- submicron IC technolog/y
- submicron technolog/y
- subnanosecond technolog/y
- substrate technolog/y
- subtractive technolog/y
- superconducting technolog/y
- surface-mount technolog/y
- system technolog/y
- TAB technolog/y
- tape-automated-bonding technolog/y
- tape bumping technolog/y
- thick-film multilayer technolog/y
- thick-film hybrid technolog/y
- thin-film technolog/y
- trench technolog/y
- trench isolation technolog/y
- TTL technolog/y
- ULA technolog/y
- ultraviolet photolithography technolog/y
- unipolar technolog/y
- V-groove technolog/y
- VHSIC technolog/y
- wafer bumping technolog/y
- water treatment technolog/y
- wiring technolog/y
- X-ray technolog/yEnglish-Ukrainian dictionary of microelectronics > technolog/y
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7 mask
1. ім.1) фотошаблон; шаблон; (вільна) маска; трафарет2) маска, маскуючий шар2. дієсл. маскувати - artwork mask
- base-region mask
- base mask
- base-resistor mask
- bimetal mask
- blocking mask
- chrome mask
- collector mask
- composite mask
- contact-area mask
- contact mask
- contact-print additional mask
- custom mask
- deep UV mask
- delineation mask
- deposition mask
- diffusion mask
- doping mask
- dry film solder mask
- E-beam mask
- E-chrome mask
- electron-beam generated mask
- emitter mask
- emulsion mask
- etch ing mask
- etch mask
- etch-resistantmask
- etch-resistmask
- evaporation mask
- exposure mask
- fault injection mask
- faultless mask
- field-oxidemask
- fieldmask
- fine-line mask
- gold mask
- grid mask
- hard-surface mask
- high-contrast X-ray mask
- high-flatness mask
- high-transmission X-ray mask
- IC mask
- in situ mask
- insulator mask
- interconnection mask
- ion-beam stencil mask
- ion-implantation mask
- iron-oxide mask
- isolation mask
- layered mask
- lithographic mask
- master mask
- metal mask
- metal etched mask
- metallization etching mask
- metal-on-glass mask
- metal-on-polymer mask
- moving mask
- multi-pinhole mask
- native охide mask
- negative mask
- nonerodible mask
- offset mask
- optical mask
- optical gate mask
- overlaid mask
- oxidation mask
- oxygen-impermeable mask
- pattern mask
- pattern transfer mask
- photolithographic mask
- photoresist mask
- plating mask
- production mask
- programmingmask
- programmask
- projection mask
- p-well mask
- quartz mask
- refractory mask
- resistor-body mask
- reticle mask
- self-aligned mask
- sputter mask
- stencil mask
- step-and-repeat mask
- thick-film screen mask
- thin-film mask
- trench mask
- vacuum-deposition mask
- work mask
- X-ray lithography mask
- X-ray mask
- 1x mask
- 1:1 mask
См. также в других словарях:
Dry etching — refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes… … Wikipedia
dry etching — sausasis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. dry etching vok. trockene Ätzung, f rus. сухое травление, n pranc. décapage sec, m … Radioelektronikos terminų žodynas
dry-etching apparatus — sausojo ėsdinimo įrenginys statusas T sritis radioelektronika atitikmenys: angl. dry etching apparatus vok. Trockenätzanlage, f rus. установка сухого травления, f pranc. installation de décapage à sec, f … Radioelektronikos terminų žodynas
dry-etching reactor — sausasis ėsdintuvas statusas T sritis radioelektronika atitikmenys: angl. dry etching reactor vok. Trockenätzreaktor, m rus. реактор сухого травления, m pranc. réacteur pour décapage à sec, m … Radioelektronikos terminų žodynas
Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… … Wikipedia
Dry — (dr[imac]), a. [Compar. {Drier}; superl. {Driest}.] [OE. dru[yogh]e, druye, drie, AS. dryge; akin to LG. dr[ o]ge, D. droog, OHG. trucchan, G. trocken, Icel. draugr a dry log. Cf. {Drought}, {Drouth}, 3d {Drug}.] 1. Free from moisture; having… … The Collaborative International Dictionary of English
Dry area — Dry Dry (dr[imac]), a. [Compar. {Drier}; superl. {Driest}.] [OE. dru[yogh]e, druye, drie, AS. dryge; akin to LG. dr[ o]ge, D. droog, OHG. trucchan, G. trocken, Icel. draugr a dry log. Cf. {Drought}, {Drouth}, 3d {Drug}.] 1. Free from moisture;… … The Collaborative International Dictionary of English
Dry blow — Dry Dry (dr[imac]), a. [Compar. {Drier}; superl. {Driest}.] [OE. dru[yogh]e, druye, drie, AS. dryge; akin to LG. dr[ o]ge, D. droog, OHG. trucchan, G. trocken, Icel. draugr a dry log. Cf. {Drought}, {Drouth}, 3d {Drug}.] 1. Free from moisture;… … The Collaborative International Dictionary of English
Dry bone — Dry Dry (dr[imac]), a. [Compar. {Drier}; superl. {Driest}.] [OE. dru[yogh]e, druye, drie, AS. dryge; akin to LG. dr[ o]ge, D. droog, OHG. trucchan, G. trocken, Icel. draugr a dry log. Cf. {Drought}, {Drouth}, 3d {Drug}.] 1. Free from moisture;… … The Collaborative International Dictionary of English
Dry castor — Dry Dry (dr[imac]), a. [Compar. {Drier}; superl. {Driest}.] [OE. dru[yogh]e, druye, drie, AS. dryge; akin to LG. dr[ o]ge, D. droog, OHG. trucchan, G. trocken, Icel. draugr a dry log. Cf. {Drought}, {Drouth}, 3d {Drug}.] 1. Free from moisture;… … The Collaborative International Dictionary of English
Dry cupping — Dry Dry (dr[imac]), a. [Compar. {Drier}; superl. {Driest}.] [OE. dru[yogh]e, druye, drie, AS. dryge; akin to LG. dr[ o]ge, D. droog, OHG. trucchan, G. trocken, Icel. draugr a dry log. Cf. {Drought}, {Drouth}, 3d {Drug}.] 1. Free from moisture;… … The Collaborative International Dictionary of English
